Device for inductive heating and focusing of laser produced plasma
نویسندگان
چکیده
منابع مشابه
ECR heating of laser produced Sn plasma for drift control in B field
A laser produced Sn plasma driven with a pulsed CO2 laser and emitting EUV radiation has been generated in a magnetic field of 0.5T. The multiple-ionized plasma ions are efficiently guided along the B field lines of the double coil magnet. The neutral Sn atoms and Sn clusters, however, expand freely inside the vacuum chamber and contaminate e.g. EUV optics. We therefore evaluated ECR heating of...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2019
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.5108600